工作距离和探头选择对FESEM图像质量影响探析

论文摘要

为了探讨不同工作距离下考察探头和样品的相对位置的选择对最后测试结果的影响,以泡沫镍及介孔二氧化硅小球这两种典型样品为例,通过变换探头及电镜参数的方法,进行了对比研究。分析结果表明:工作距离越大,分辨率不一定越差。旨在为电镜测试中工作距离和探头选择提供参考依据。

论文目录

文章来源

类型: 期刊论文

作者: 徐泽忠,林中清

关键词: 工作距离,探头选择,图像质量,探析

来源: 佳木斯大学学报(自然科学版) 2019年04期

年度: 2019

分类: 工程科技Ⅱ辑,工程科技Ⅰ辑

专业: 无机化工,金属学及金属工艺

单位: 合肥学院分析测试中心,安徽大学现代实验技术中心

分类号: TG146.15;TQ127.2

页码: 680-682

总页数: 3

文件大小: 1817K

下载量: 22

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标签：工作距离论文;  探头选择论文;  图像质量论文;  探析论文;