Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

论文摘要

Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet（VUV） applications. In this paper, the dependence of spectral property and environmental durability of MgF2 over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF2 layer are investigated in detail. Optics（reflectance）, structure（surface morphology and crystalline）, and environmental durability（humidity test） are characterized and discussed. The results show that both optical and moistureresistant properties of MgF2 over-coated Al mirrors are dependent on MgF2 deposition temperature, and the optimal deposition temperature for the outermost MgF2 layer should be between 250℃ and 300℃ for MgF2 over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

论文目录

1. Introduction

2. Experiment

2.1. Film preparation

2.2. Film characterization

3. Results and discussion

3.1. Optical properties

3.2. Microstructure

3.2.1. Crystalline structure

3.2.2. Surface morphology

3.3. Humidity sensitivity

4. Conclusions

文章来源

类型: 期刊论文

作者: 郭春,李斌成,孔明东,林大伟

来源: Chinese Physics B 2019年11期

年度: 2019

分类: 基础科学,工程科技Ⅰ辑

专业: 金属学及金属工艺

单位: Institute of Optics and Electronics, Chinese Academy of Sciences,Key Laboratory of Optical Engineering, Chinese Academy of Sciences,School of Optoelectronic Information, University of Electronic Science and Technology of China,University of Chinese Academy of Sciences

基金: Project supported by the West Light Foundation of the Chinese Academy of Sciences,the National Natural Science Foundation of China(Grant No.61805247)

分类号: TG174.4

页码: 353-357

总页数: 5

文件大小: 362K

下载量: 7

Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

论文摘要

论文目录

文章来源

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